Key Features:
Fast startup
Easy operation
Reliable failure analysis
Future expandability
With our long experience in the fields of industry and material science, Olympus provides many clear-cut solutions making electronic device inspections easier, quicker and more efficient.
The Olympus MX61/MX61L semiconductor inspection microscopes have been developed specifically to meet the demands of wafer inspection. These user-friendly microscopes allow operators to work in an ergonomically correct position and benefit from smoother operation throughout extended inspection periods. Productivity and integration of the instruments into the work area are, thereby, maximised.
Always optimum contrast
The integrated motorised aperture stop is automatically adjusted to the objective in use. Thus the best image quality for every magnification is achieved making routine inspections more comfortable for the eyes and increases the failure detection rate.
Various contrast methods
The MX61 is equipped by default with brightfield and darkfield illumination. In addition it allows the insertion of a contrast cube to achieve polarised light for differential interference contrast (DIC) or fluorescence illumination for the detection of resist layers and organic particles.
Intuitive ‘Frontal Control’ for faster operation
With the MX61 there is no long search for a comfortable position or the right controls. All important controls fall to hand at the front of the microscope close to the focussing knobs. Objective change as well as illumination and aperture stop adjustments can be operated without the need to take the eyes away from the eyepieces.
Space saving design
The small footprint and slim design of the MX61 makes it easy to arrange workplaces that are cost effective and practical. The slim frame design reduces the transfer distance from wafer handling systems to the microscope stage. This increases the wafer transfer speed thereby minimising the contamination risk.
Ergonomic design
The MX61 fulfils the most recent SEMI S2/S8 standards ensuring reliable results and comfortable operation.
Perfectly designed for waferloader attachment
The MX61 frame is perfectly designed to suit the AL110 waferloader series from Olympus. The slim design of the MX61 frame shortens the transfer distance and makes the wafer handling faster as ever.
Real time laser auto focus (optional)
For full automated inspection tasks or the inspection of low contrast specimen (e.g. polished surfaces) the tracking function of the real time laser auto focus ensures always the correct focus position.
Ready for digital imaging
The MX61 is equipped with a PC interface that allows observing the microscope status. Thus objective magnifications can be automatically stored while taking a picture. This guarantees reliable image information for further processing and analysis.
New darkfield illuminator and newly designed objectives
The newly developed illuminator of the MX61 in combination with the new Plan Fluoride BD2 objectives provides up to 2 times better darkfield contrast than comparable microscopes in this class, thus making detection of finest defects much faster and more reliable.
Disc Confocal attachment for real time images with 0.2 µm resolution
For the inspection of most advanced semiconductor devices the resolution of the MX61 can be enhanced by the U-CFU confocal module. The patented disc provides excellent brightness and contrast.
Looking inside your wafer with reflected infra red illumination
The MX61 allows the adaptation of special infra red optical components to enable infra red microscopy. This allows looking through silicon layers which are not transparent for visible light.
Fluorescence observation for easy detection of resist residuals
For the easy detection of resist residuals and organic particles the MX61 can be equipped with a fluorescence mirror cube and high intensity light sources.
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